Dear GABRIEL
1)Chilled water inlet temperature is the temperature of the chilled water stream entering the chiller.It is the temperature of the fluid returning from load e.g. air handling unit.
whereas cooling water temperature is the the temperature at which the cooling water flow stream enters the chiller from cooling tower to provide cooling in its condenser unit.
2)Chilled water set point temperature is the the set point temperature for the chilled water stream. If the chiller has the capacity to meet the current load, the chiller will modulate to meet the load and chilled water stream will leave at this temperature.
So chilled water inlet temperature is at which chilled water from load enter the chiller and chilled water set point is the temperature at which you want the chilled water from chiller to enter in load.
3)Most of the chiller manufacturing companies provides softwares to check chiller performance by varying chilled water inlet temp,cooling water temp etc.Using that software you can create your own data file.for example check this link
I hope i answered your question.
M Wajahat Khan